MS

Masaki Sano

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #342,542 of 548,734Top 65%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10927453 TiN-based film and TiN-based film forming method Tadahiro Ishizaka, Masaki Koizumi, Seokhyoung HONG 2021-02-23