Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048016 | Foreign substance detection device, foreign substance detection method and recording medium | Masato Hayashi, Kohei Noguchi, Daisuke Kajiwara | 2021-06-29 |
| 11002656 | Substrate processing apparatus, substrate processing system, and substrate processing method | Masato Hayashi, Kohei Noguchi, Makoto Ogata | 2021-05-11 |