Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10896811 | Antenna device, radiation method of electromagnetic waves, plasma processing apparatus, and plasma processing method | Ayako Ito, Yuki KAWADA, Takahiro Senda, Naoki Matsumoto | 2021-01-19 |