KM

Kenichirou Matsuyama

TL Tokyo Electron Limited: 2 patents #116 of 787Top 15%
Overall (2021): #141,530 of 548,734Top 30%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11139189 Substrate processing apparatus and substrate processing method 2021-10-05
10884337 Substrate processing apparatus and substrate processing method 2021-01-05