Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201051 | Method for layer by layer growth of conformal films | Jodi Grzeskowiak, Anton J. deVilliers | 2021-12-14 |
| 10923363 | Method for increasing pattern density on a wafer | Sanjana Das, Anton J. deVilliers | 2021-02-16 |