Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164729 | Measuring device and operation method of system for inspecting focus ring | Kippei Sugita | 2021-11-02 |
| 10948317 | Measuring device and method for obtaining amount of deviation of measuring device | Kippei Sugita | 2021-03-16 |
| 10903100 | Method of obtaining amount of deviation of a measuring device, and method of calibrating transfer position data in a processing system | Kippei Sugita | 2021-01-26 |