Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043378 | Systems and methods for inhibiting detectivity, metal particle contamination, and film growth on wafers | Richard Farrell, Hoyoung Kang | 2021-06-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043378 | Systems and methods for inhibiting detectivity, metal particle contamination, and film growth on wafers | Richard Farrell, Hoyoung Kang | 2021-06-22 |