AM

Akio Miyara

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #542,033 of 548,734Top 100%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11075062 Vacuum processing apparatus Yun Mo, Yoshinobu Ohya, Keishi Kariya 2021-07-27