Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923379 | Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure | Chin-Yi Liu, Rajitha Vemuri, Padma Gopalakrishnan | 2021-02-16 |