Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10898618 | Amorphous silicon oxide, amorphous silicon oxynitride, and amorphous silicon nitride thin films and uses thereof | Pranesh Aswath, Megen Maginot, Nickolay V. Lavrick | 2021-01-26 |