Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910253 | Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber | William P. Inhofer, Sean Moore | 2021-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910253 | Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber | William P. Inhofer, Sean Moore | 2021-02-02 |