Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199528 | Sensor built-in filter structure and wafer accommodation container | Tatsuhiro KOTSUGAI, Takeshi Kagaya | 2021-12-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199528 | Sensor built-in filter structure and wafer accommodation container | Tatsuhiro KOTSUGAI, Takeshi Kagaya | 2021-12-14 |