Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10943773 | Ruthenium sputtering target and ruthenium alloy sputtering target | — | 2021-03-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10943773 | Ruthenium sputtering target and ruthenium alloy sputtering target | — | 2021-03-09 |