Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037789 | Cut last self-aligned litho-etch patterning | Kuan-Wei Huang, Chia-Ying Lee | 2021-06-15 |
| 11018021 | Curing photo resist for improving etching selectivity | Wen-Kuo Hsieh, Tsung-Hung Chu | 2021-05-25 |