Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003089 | Method and apparatus for dynamic lithographic exposure | De-Fang Huang, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2021-05-11 |
| 10948816 | Pellicle frame and pellicle | Yoshihiro Taguchi, Takayuki Yamaguchi, Yasuo Ishiwata | 2021-03-16 |