Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11103970 | Chemical-mechanical planarization system | Chun-Hsi Huang | 2021-08-31 |
| 11072051 | Platen rotation method | Bruce CHO, Chia-Ying TIEN | 2021-07-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11103970 | Chemical-mechanical planarization system | Chun-Hsi Huang | 2021-08-31 |
| 11072051 | Platen rotation method | Bruce CHO, Chia-Ying TIEN | 2021-07-27 |