Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183409 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Chi-Feng Tung | 2021-11-23 |
| 11107713 | Conveying system and method for operating the same | Fu-Hsien Li, Chi-Feng Tung | 2021-08-31 |
| 11062931 | Semiconductor apparatus with inner wafer carrier buffer and method | Jason Shen, Wen-Yu Huang, Li-Jen Ko | 2021-07-13 |
| 11011402 | Transport system of semiconductor fabrication facility, associated movable container and method | Fu-Hsien Li, Chi-Feng Tung | 2021-05-18 |
| 11001442 | Stocking system | Guan-Cyun Li, Chi-Feng Tung, Fu-Hsien Li | 2021-05-11 |