Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131931 | Fluidic leakage handling for semiconductor apparatus | Pei-Yi Su | 2021-09-28 |
| 10976676 | Contamination handling for semiconductor apparatus | Chih-Che Lin, Pei-Yi Su | 2021-04-13 |