Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205709 | Defect filling in patterned layer | Chia-Ao Chang, Chien-Hao Chen, Yung-Cheng Lu | 2021-12-21 |
| 11183426 | Method for forming a FinFET structure that prevents or reduces deformation of adjacent fins | Yun Chen Teng, Chien-Hao Chen | 2021-11-23 |
| 11114545 | Cap layer and anneal for gapfill improvement | Chien-Hao Chen | 2021-09-07 |
| 11107903 | Selective silicon growth for gapfill improvement | Chien-Hao Chen, Pin-Ju Liang, I-Chen Yang | 2021-08-31 |