Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11071513 | Test key design to enable X-ray scatterometry measurement | Shyh-Shin Ferng, Chung-Li Huang, Yi-Hung Lin | 2021-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11071513 | Test key design to enable X-ray scatterometry measurement | Shyh-Shin Ferng, Chung-Li Huang, Yi-Hung Lin | 2021-07-27 |