Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982327 | CVD apparatus with multi-zone thickness control | Chung-Wei Fang, Yi-Hsun Chiu, Yao Dai | 2021-04-20 |
| 10975473 | CVD apparatus with multi-zone thickness control | Chung-Wei Fang, Yi-Hsun Chiu, Yao Dai | 2021-04-13 |