Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152306 | Dielectric film for semiconductor fabrication | Cheng-Yi Wu, Li-Hsuan Chu, Ching-Wen Wen, Chia-Chun Hung, Chin-Szu Lee +1 more | 2021-10-19 |
| 10998219 | Wafer support device and method for removing lift pin therefrom | Zong-Han Hu, Yu-Shan Shih, Chin-Szu Lee | 2021-05-04 |