Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211232 | Methods for cleaning semiconductor device manufacturing apparatus | Ian Hsieh, Yan Liu | 2021-12-28 |
| 11177183 | Thickness measurement system and method | Yan Liu, Chien-Chih Wu | 2021-11-16 |
| 11177150 | Cluster tool and method using the same | Wei-Hua Houng | 2021-11-16 |
| 11139149 | Gas injector | Yan Liu, Ming-Feng Chen, Li-Shi Liu | 2021-10-05 |
| 11101163 | Systems and methods for automated robotic arm sensing | Yan Liu, Hung-Wen Chen | 2021-08-24 |
| 11031264 | Semiconductor device manufacturing system | Yan Liu | 2021-06-08 |
| 11004713 | Robot arm device and method for transferring wafer | Wei-Hua Houng | 2021-05-11 |
| 10978331 | Systems and methods for orientator based wafer defect sensing | Yan Liu, Daniel Yang | 2021-04-13 |
| 10978333 | Systems and methods for robotic arm sensing | Yan Liu, Ming-Feng Chen, Hung-Wen Chen | 2021-04-13 |