Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187973 | Reflective EUV mask absorber manipulation to improve wafer contrast | Lawrence S. Melvin, III | 2021-11-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187973 | Reflective EUV mask absorber manipulation to improve wafer contrast | Lawrence S. Melvin, III | 2021-11-30 |