Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024528 | Electrostatic chuck device having focus ring | Yoshiaki Moriya, Hitoshi Kouno, Kazuto Ando, Yuuki Kinpara | 2021-06-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024528 | Electrostatic chuck device having focus ring | Yoshiaki Moriya, Hitoshi Kouno, Kazuto Ando, Yuuki Kinpara | 2021-06-01 |