Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10894744 | Oxide sintered material and method for manufacturing the same, sputtering target, and method for manufacturing semiconductor device | Miki Miyanaga, Kenichi Watatani, Hideaki Awata, Aiko TOMINAGA | 2021-01-19 |