Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195700 | Etching apparatus | Masami Shibagaki, Atsushi Sekiguchi | 2021-12-07 |
| 11164717 | Electron microscope | Hideki Kikuchi, Tadao Furutsu, Kouichirou Saitou, Ryoji Namekawa | 2021-11-02 |