Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11072856 | Vapor phase growth method | Masayuki TSUKUI, Hajime Nago | 2021-07-27 |
| 11022428 | Growth rate detection apparatus, vapor deposition apparatus, and vapor deposition rate detection method | — | 2021-06-01 |