Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198748 | Resin, resist composition and method for producing resist pattern | Satoshi Yamaguchi, Koji Ichikawa | 2021-12-14 |
| 10975028 | Salt and photoresist composition containing the same | Satoshi Yamamoto, Koji Ichikawa | 2021-04-13 |
| 10882839 | Salt and photoresist composition containing the same | Natsuki Okada, Koji Ichikawa | 2021-01-05 |