Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107971 | Laminated substrate with piezoelectric thin film, piezoelectric thin film element and method for manufacturing this element | Kenji Shibata, Kazutoshi Watanabe | 2021-08-31 |
| 11094539 | Method for manufacturing nitride semiconductor substrate and nitride semiconductor substrate | Takehiro Yoshida | 2021-08-17 |
| 10998188 | Gallium nitride laminated substrate and semiconductor device | Tomoyoshi Mishima, Hiroshi Ohta, Masatomo Shibata | 2021-05-04 |
| 10978296 | Nitride semiconductor substrate, semiconductor laminate, laminated structure, method for manufacturing nitride semiconductor substrate and method for manufacturing semiconductor laminate | Takehiro Yoshida, Hajime Fujikura, Masatomo Shibata | 2021-04-13 |