Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170988 | Method of double-side polishing silicon wafer | Ryuichi Tanimoto, Ichiro Yamazaki | 2021-11-09 |
| 11127584 | Method of producing carrier and method of polishing wafer | Tomonori Miura | 2021-09-21 |