Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208718 | Epitaxial growth device, production method for epitaxial wafer, and lift pin for epitaxial growth device | — | 2021-12-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208718 | Epitaxial growth device, production method for epitaxial wafer, and lift pin for epitaxial growth device | — | 2021-12-28 |