Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114317 | Method for cleaning semiconductor wafer and manufacturing method of semiconductor wafer using the method for cleaning | — | 2021-09-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114317 | Method for cleaning semiconductor wafer and manufacturing method of semiconductor wafer using the method for cleaning | — | 2021-09-07 |