Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10975495 | Epitaxial growth apparatus, preheat ring, and method of manufacturing epitaxial wafer using these | — | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10975495 | Epitaxial growth apparatus, preheat ring, and method of manufacturing epitaxial wafer using these | — | 2021-04-13 |