Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177126 | Removing or preventing dry etch-induced damage in Al/In/GaN films by photoelectrochemical etching | Morteza Monavarian, Daniel F. Feezell, Saadat Mishkat-Ul-Masabih, Andrew A. Allerman, Andrew M. Armstrong +1 more | 2021-11-16 |