Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998174 | Dry etching equipment and method for producing semiconductor device | Tetsuya Tatsumi | 2021-05-04 |
| 10929579 | Film formation simulation method, program, and semiconductor processing system | — | 2021-02-23 |