Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11064601 | Methods and systems for imploding a liquid liner | David Franklin Plant, Robert Vlastimil Bouchal, Troy Nickolas Tyler, Victoria Suponitsky, Michael Harcourt Delage +2 more | 2021-07-13 |
| 10976668 | Illumination optical unit and optical system for EUV projection lithography | — | 2021-04-13 |