Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978325 | Substrate storage container management system, load port, and substrate storage container management method | Tomoya Mizutani | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978325 | Substrate storage container management system, load port, and substrate storage container management method | Tomoya Mizutani | 2021-04-13 |