Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11148250 | Method for dressing polishing pads | Vladimir Dutschke, Torsten Olbrich, Markus Schnappauf | 2021-10-19 |
| 11075070 | Monocrystalline semiconductor wafer and method for producing a semiconductor wafer | Klaus Roettger, Herbert Becker, Andreas Muehe | 2021-07-27 |