Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114305 | Etching method and semiconductor manufacturing method | — | 2021-09-07 |
| 11028474 | Method for cleaning SiC monocrystal growth furnace | Hideyuki Kurihara | 2021-06-08 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114305 | Etching method and semiconductor manufacturing method | — | 2021-09-07 |
| 11028474 | Method for cleaning SiC monocrystal growth furnace | Hideyuki Kurihara | 2021-06-08 |