Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985042 | SiC substrate, SiC epitaxial wafer, and method of manufacturing the same | Yoshitaka Nishihara | 2021-04-20 |
| 10955350 | SiC wafer defect measuring method, reference sample, and method of manufacturing SiC epitaxial wafer | — | 2021-03-23 |