TM

Tomotake Minemura

SC Shinko Electric Industries Co.: 2 patents #4 of 72Top 6%
Overall (2021): #103,703 of 548,734Top 20%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11177152 Ceramic substrate containing aluminum oxide and electrostatic chuck having electrode containing tungsten with oxides 2021-11-16
10957574 Electrostatic chuck and substrate fixing apparatus 2021-03-23