Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11021783 | Reactive sputtering apparatus and film formation method for composite metal compound film or mixture film using the same | — | 2021-06-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11021783 | Reactive sputtering apparatus and film formation method for composite metal compound film or mixture film using the same | — | 2021-06-01 |