Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11065735 | Manufacturing method of carrier for double-side polishing apparatus and method of double-side polishing wafer | Yuki Tanaka | 2021-07-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11065735 | Manufacturing method of carrier for double-side polishing apparatus and method of double-side polishing wafer | Yuki Tanaka | 2021-07-20 |