Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208719 | SiC composite substrate and method for manufacturing same | Yoshihiro Kubota, Hiroyuki Nagasawa | 2021-12-28 |
| 11195987 | Method for producing composite wafer having oxide single-crystal film | Makoto Kawai | 2021-12-07 |
| 11177123 | Compound semiconductor laminate substrate, method for manufacturing same, and semiconductor element | Hiroyuki Nagasawa, Yoshihiro Kubota | 2021-11-16 |
| 11128277 | Method for producing composite wafer | Masayuki Tanno, Koji Kato | 2021-09-21 |
| 11112345 | Microparticle measurement device and cleaning method for microparticle measurement device | Yoshitsugu Sakai, Masaaki Abe, Koichi Tsukihara, Shinichi Hasegawa | 2021-09-07 |
| 10971674 | Method for producing composite wafer having oxide single-crystal film | Makoto Kawai | 2021-04-06 |
| 10886890 | Composite substrate for surface acoustic wave device, method of producing composite substrate for surface acoustic wave device, and surface acoustic wave device using composite substrate | Masayuki Tanno, Shozo Shirai | 2021-01-05 |
| D907242 | Micro flow channel chip | Masataka Shinoda, Masaya Kakuta, Takeshi Yamasaki, Tatsumi Ito, Yuji Akiyama +2 more | 2021-01-05 |