Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10991611 | Wafer processing laminate and method for processing wafer | Shohei Tagami, Michihiro Sugo | 2021-04-27 |
| 10982053 | Polymer containing silphenylene and polyether structures | Hitoshi Maruyama, Michihiro Sugo | 2021-04-20 |
| 10948823 | Laminate and pattern forming method | Satoshi Asai, Kyoko Soga | 2021-03-16 |