Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10990023 | Method and apparatus for diffraction-based overlay measurement | Yen-Liang Chen | 2021-04-27 |
| 10983005 | Spectroscopic overlay metrology | Kai-Chiang Wu, Kai-Hsiung Chen, Chih-Ming Ke, Yen-Liang Chen | 2021-04-20 |
| 10969697 | Overlay metrology tool and methods of performing overlay measurements | Chun-Liang Lung | 2021-04-06 |