TS

Tongke Su

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #20 of 59Top 35%
Overall (2021): #227,012 of 548,734Top 45%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11106005 Prism rotation adjustment mechanism, stepper exposure system, and stepper — 2021-08-31