Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983415 | Shutter device, method of controlling same, photolithography machine, and method of controlling exposure dose thereof | Zhiyong Jiang, Yanfei Wang | 2021-04-20 |
| 10928704 | Shutter device | Yanfei Wang, Xiang Jia | 2021-02-23 |