Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983448 | Objective lens protection device, objective lens system and lithographic device | Xianming Jimmy Li | 2021-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983448 | Objective lens protection device, objective lens system and lithographic device | Xianming Jimmy Li | 2021-04-20 |